Fusion Systems Corporation Profile last edited on: 12/14/2015
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Location Information
Location: Single
Congr. District: 08
County: Montgomery
Congr. District: 08
County: Montgomery
Public Profile
In June 1997, semiconductor equipment manufacturer Fusion Systems was acquired by Eaton Corporation. Fusion Systems had developed to become a leading supplier of front-end process equipment to the semiconductor industry with strong positions in photoresist ashing, post-ash residue removal and photostabilization. Ashing is a low-pollution, high-technology resist removal process that is key to new generations of semiconductor technology. Fusion Systems' photostabilizer rapidly hardens photoresist patterns on silicon wafers, which allows for greater reliability and higher yields than with conventional thermal resist stabilization methods.
Extent of SBIR involvement
Synopsis: Awardee Business Condition
Employee Range
500+Revenue Range
Over 50MVC funded?
YesPublic/Private
Publicly TradedStock Info
NASDAQ : FUSNIP Holdings
50-74Awards Distribution by Agency
Most Recent SBIR Projects
| Year | Phase | Agency | Total Amount | |
|---|---|---|---|---|
| 1993 | 2 | NASA | $549,892 | |
| Project Title: Efficient full spectrum long lived non toxic lamp for plant growth | ||||
| 1993 | 2 | EPA | $198,777 | |
| Project Title: Mercury-free high CRI efficient lamp | ||||
| 1991 | 1 | NSF | $46,972 | |
| Project Title: Anomalous metalic like optical phenomena in multilayer thin film assemblies | ||||
| 1990 | 2 | NSF | $273,133 | |
| Project Title: The Cooling Of High Intensity Electrodeless Bulbs | ||||
| 1986 | 2 | Army | $360,639 | |
| Project Title: UV-enhanced MPVE process for low temperature HgCdTe epitaxy | ||||
Key People / Management
David Ferris
Paul S Gustafson
Donald M Spitzer
Michael Ury
Paul S Gustafson
Donald M Spitzer
Michael Ury
