Researchers have fabricated ultraviolet reflectors using aluminumbased dielectric multilayers. The resulting optical characteristics of the multilayer assembly display phenomena characteristic of anomalous, metallic-like optical properties, while retaining the basic dielectric character of the materials. The phenomena was discovered during studies for development of high reflectance (greater than broadband Ultraviolet reflectors for use in the deep UV and mid UV portions of the electromagnetic spectrum. Researchers are investigating the optical and electronic properties of this phenomena for potential application in the deep UV and vacuum UV (VUV) as well as other regions of the electromagnetic spectrum, and apply suitable analytical techniques to attempt to further define the anomalous phenomena in both theoretical and experimental terms. The possibility that multilayer analogues may exist for alternate, proprietary materials is also being studied.The potential commercial application as described by the awardee: The most likely applications are for very high reflectance materials in the deep/XUV and possibly the soft x-ray regions of the electro-magnetic spectrum for use in semiconductor fabrication, astronomy, UV manufacturing processes, excimer laser optics, and other optical areas.
