Fusion Systems Corporation has been very successful in designing and manufacturing unique microwave powered electrodeless UV light sources for industrial applications worldwide. The most serious limitation to extending the technology to small high intensity spherical lamps is appropriate cooling. If progress can be made in this area, then applications such as step and repeat microlithography of integrated-grated circuits can be extended below present limits. The present company has done extensive experimentation and supported basic research at a university (VPI & SU) on the topic of jet cooling.It appears possible to reduce the diameter of electrodeless bulbs and increase the power density, but cooling severely limits the design. In Phase I of this work it is proposed to examine the basic nature of the physical mechanisms involved in jet cooling of spheres. Tests will then be conducted to evaluate the effectiveness of techniques like acoustic excitation, or passive controls for spreading the jets, increasing-ing the overall mixing and thereby the rate of heat transfer.Commercial Applications:Semiconductor microlithography uses arc-lamp point sources which are plagued by inadequate output at lower wavelengths, electrode sputtering, uniformity problems and rapid output decay. An electrodeless microwave powered lamp eliminates these problems and will allow for higher quality microlithography and increased "up-time". Its implementation requires that the cooling of small high powered bulbs be extended beyond today's art.
