k-Space Associates Inc. manufactures and supplies in-situ, in-line, and ex-situ thin-film metrology tools for semiconductor, surface sciences, thin-film technology, and photovoltaic industries. The company offers plug-in options, wafer and film temperature monitors, thin-film deposition monitoring tools, multi-beam optical sensors, multi-beam optical sensors ultra/thermal scans, optical and analysis metrology tools, and real-time integrated metrology tools. It provides accessories, such as rotation monitoring and triggering accessories, laser trigger modules, reflection high-energy electron diffraction screens, beam-alignment substrates, and pulse control accessories. The company offers its products for monitoring thin-film deposition processes, including molecular beam epitaxial, metal organic chemical vapor depositions, pulsed laser depositions, sputtering, thermal and E-beam evaporations, and PVD applications, as well as in research, development, and production monitoring of semiconductor, photovoltaic, annealing, and processing applications. It also provides its products for non-contact and non-invasive measurement of parameters, such as wafer and film temperatures, thin-film stresses and strains, surface roughness and surface quality, deposition rates, film thicknesses, optical band gaps, and atomic spacing/absolute lattice spacing; in-house metrology services; and wafer curvatures, bows, and tilts. The company was founded in 1992 and is headquartered in Dexter, Michigan.
