
Halogen assisted diamond depsoition in a microwave plasma reactorAward last edited on: 3/22/2002
Sponsored Program
SBIRAwarding Agency
DOD : DARPATotal Award Amount
$799,976Award Phase
2Solicitation Topic Code
SB912-097Principal Investigator
Evelio SevillanoCompany Information
Applied Science and Technology Inc (AKA: ASTeX)
Location: Single
Congr. District: 06
County: Middlesex
Congr. District: 06
County: Middlesex
Phase I
Contract Number: DAAH01-92-C-R137Start Date: 2/5/1992 Completed: 8/5/1992
Phase I year
1992Phase I Amount
$50,000Phase II
Contract Number: DAAH01-95-C-R030Start Date: 7/1/1995 Completed: 1/10/1997