Applied Science and Technology Inc (AKA: ASTeX) Profile last edited on: 5/29/21
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UEI:
Business Identifier: Electronic Instruments and Controls 
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Location Information
Location: Single
Congr. District: 06
County: Middlesex
Congr. District: 06
County: Middlesex
Public Profile
In October 2000, Applied Science and Technology, Inc. was acquired by MKS Instruments. Applied Science and Technology, Inc. - also known as ASTeX - was involved in development and manufacture of components and sub-systems using reactive gas and power source technologies for semiconductor, medical, and industrial applications to include tech and deposition systems for advanced semiconductor packaging, telecommunications, and magnetic sensors. Microwave power generators are precision control instruments used in the production of semiconductors. Plasma deposition systems contain a regulated induction heater and a microprocessor based controller with data logging. Electron cyclotron resonance plasma sources are used for plasma etching, deposition and related applications. The equipment provides low energy ions, radicals and atomic species
Extent of SBIR involvement
Synopsis: Awardee Business Condition
Employee Range
500+Revenue Range
Over 50MVC funded?
YesPublic/Private
Publicly TradedStock Info
NASDAQ : ASTXIP Holdings
25-49Awards Distribution by Agency
Most Recent SBIR Projects
| Year | Phase | Agency | Total Amount | |
|---|---|---|---|---|
| 1997 | 1 | DOE | $71,483 | |
| Project Title: A Polycrystalline Pixel Diamond Film Particle Detector | ||||
| 1997 | 1 | DOE | $74,867 | |
| Project Title: High Growth Rate Cubic Boron Nitride Deposition | ||||
| 1997 | 2 | NSF | $319,719 | |
| Project Title: Large Area High Quality, Electron Cyclotron Resonance Chemical Vapor Deposition SiC Thin Films for Astronomical Mirrors | ||||
| 1995 | 2 | DARPA | $799,976 | |
| Project Title: Halogen assisted diamond depsoition in a microwave plasma reactor | ||||
| 1994 | 1 | DARPA | $100,000 | |
| Project Title: Plasma Processing of Materials in Microelectronics and Photonics | ||||
Key People / Management
Richard S Post -- President
Lawrence P Bourget
Edward Kelly
Mathias Koch
Evelio Sevillano
Donald K Smith
Lawrence P Bourget
Edward Kelly
Mathias Koch
Evelio Sevillano
Donald K Smith
Company News
There are no news available.
