In October 2000, Applied Science and Technology, Inc. was acquired by MKS Instruments. Applied Science and Technology, Inc. - also known as ASTeX - was involved in development and manufacture of components and sub-systems using reactive gas and power source technologies for semiconductor, medical, and industrial applications to include tech and deposition systems for advanced semiconductor packaging, telecommunications, and magnetic sensors. Microwave power generators are precision control instruments used in the production of semiconductors. Plasma deposition systems contain a regulated induction heater and a microprocessor based controller with data logging. Electron cyclotron resonance plasma sources are used for plasma etching, deposition and related applications. The equipment provides low energy ions, radicals and atomic species
