SBIR-STTR Award

Optimization of UV Enhanced OMVPE Process for Low Temperature HgCdTe Epitaxy
Award last edited on: 12/18/14

Sponsored Program
SBIR
Awarding Agency
DOD : Army
Total Award Amount
$360,639
Award Phase
2
Solicitation Topic Code
A85-042
Principal Investigator
Michael Ury

Company Information

Fusion Systems Corporation

7600 Standish Place
Rockville, MD 20855
   (301) 251-0300
   customer@eaton.com
   www.fusn.com
Location: Single
Congr. District: 08
County: Montgomery

Phase I

Contract Number: DAAL02-85-C-0182
Start Date: 00/00/00    Completed: 00/00/00
Phase I year
1985
Phase I Amount
$49,599
The availability of high sensitivity and resolution infrared detectors for the army is currently limited by the production techniques now used for creating epitaxial layers of mercury - cadmium - telluride. In particular, it is important to reduce the temperature at which the epitaxy occurs, and there is data that this can be accomplished through the use of broad-band ultraviolet radiation. Phase i * of this effort is aimed at demonstrating the technical feasibility of depositing acceptable films of mercury telluride on cadmium telluride substrates at high rates and at low temperatures by photodissociation of organometallic compounds, using proprietary electrodeless ultraviolet sources. A reaction chamber will be used which will allow us to produce both reactions in the gas phase and on the surface of the substrate. The use of two uv lamps with optimized spectral outputs should result in suitably high deposition rates at low temperatures.

Phase II

Contract Number: DAAL02-85-C-0182
Start Date: 00/00/00    Completed: 00/00/00
Phase II year
1986
Phase II Amount
$311,040
The availability of high sensitivity and resolution infrared detectors for the army is currently limited by the production techniques now used for creating epitaxial layers of mercury - cadmium - telluride. In particular, it is important to reduce the temperature at which the epitaxy occurs, and there is data that this can be accomplished through the use of broad-band ultraviolet radiation. Phase i of this effort was able to demonstrate the feasibility of depositing acceptable films of mercury telluride on cadmium telluride substrates at high rates and at low temperatues by photodissociation of organometallic compounds, using electrodeless ultraviolet sources. Phase ii of this program will optimize this process and seek to resolve all the technical obstacles to building a prototype system.