In January 2007, Therma-Wave Inc was acquired by KLA-Tencor Corporation. Therma-Wave, Inc. is engaged in the development, manufacture, marketing and service of process control metrology systems used in the manufacture of semiconductors. Process control metrology is used to monitor process parameters in order to enable semiconductor manufacturers to maintain high overall manufacturing yield, reduce the size of the circuit features imprinted on the semiconductor to improve the performance of the semiconductor device and increase their equipment productivity. The Company's product families, Therma-Probe, Opti-Probe, Opti-Probe CD&trade and RT/CD and Integra integrated metrology products, use proprietary and patented technology to provide precise, non-contact, non-destructive measurement for every basic building block (process module) in the manufacture of integrated circuits.
