Company Profile

Lumarray is a lithography company whose technology - Zone-Plate-Array Lithography (ZPAL) - integrates recent advances in microfabrication, micromechanics and fast computing to produce a lithography tool that will handle the lithographic needs of the future. Offering a completely new way of doing lithography - advantageous in terms of cost and flexibility - the firm is working to commercialize a high-throughput maskless lithography tool that would allow for the possibility of transfering a design drawn on a computer screen directly onto a substrate. ZPAL technology is extendable to many future generations of semiconductor devices and should be capable of reaching the absolute limits of the lithographic process. The firm had originally spun out of the MIT NanoStructures laboratory that was itself founded some 25 years earlier by the President of LumArray - Prof. Henry I. Smith.