JC Nabity Lithography Systems produces Nanometer Pattern Generation System (NPGS) a scanning Electron Microsope SEM lithography system at research institutions in North America, and its use is becoming widespread around the world. The objective for NPGS is to provide a powerful, versatile, and easy to use system for doing state-of-the-art electron beam lithography using a commercial SEM or STEM. The success of NPGS at meeting this goal is supported by the strong recommendations from current users.
