Company Profile

Fusion Systems Corporation
Profile last edited on: 12/14/2015      CAGE:       UEI:

Business Identifier: NO Business Identifier is currently available for this company.
Year Founded
First Award
Latest Award
Program Status
Inactive (Acquired)
Popularity Index
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Location Information

7600 Standish Place
Rockville, MD 20855
   (301) 251-0300
Location: Single
Congr. District: 08
County: Montgomery

Public Profile

In June 1997, semiconductor equipment manufacturer Fusion Systems was acquired by Eaton Corporation. Fusion Systems had developed to become a leading supplier of front-end process equipment to the semiconductor industry with strong positions in photoresist ashing, post-ash residue removal and photostabilization. Ashing is a low-pollution, high-technology resist removal process that is key to new generations of semiconductor technology. Fusion Systems' photostabilizer rapidly hardens photoresist patterns on silicon wafers, which allows for greater reliability and higher yields than with conventional thermal resist stabilization methods.

Extent of SBIR involvement

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Synopsis: Awardee Business Condition

Employee Range
Revenue Range
Over 50M
VC funded?
Publicly Traded
Stock Info
IP Holdings

Awards Distribution by Agency

Most Recent SBIR Projects

Year Phase Agency Total Amount
1993 2 NASA $549,892
Project Title: Efficient full spectrum long lived non toxic lamp for plant growth
1993 2 EPA $198,777
Project Title: Mercury-free high CRI efficient lamp
1991 1 NSF $46,972
Project Title: Anomalous metalic like optical phenomena in multilayer thin film assemblies
1990 2 NSF $273,133
Project Title: The Cooling Of High Intensity Electrodeless Bulbs
1986 2 Army $360,639
Project Title: UV-enhanced MPVE process for low temperature HgCdTe epitaxy

Key People / Management

  David Ferris

  Paul S Gustafson

  Donald M Spitzer

  Michael Ury