In 2000, Epion was acquired by JDS Uniphase - one of many SBIR acquisitions by that firm in the period but subsequently came back into SBIR involvement. Epion manufactures and supplies commercial gas cluster ion beam (GCIB) equipment for semiconductor and related manufacturing. Its products include nFusion Doping System, which offers ultra-shallow doping of atoms to high concentrations without channeling; and Ultra Trimmer Corrective Etch System that is used to trim surface layers to improve device performance or yields. The firm also markets GCIB systems to companies for the enhancement of critical surfaces in devices used for data storage, optics, and telecommunications in the US and Japan. Epion Inc. was formerly known as Epion Corporation but changed its name to TEL Epion Inc. in January 2007 after the firm was acquired by Tokyo Electron .
