
Flexible Micro- and Nano-Patterning Tools for PhotonicsAward last edited on: 4/3/2019
Sponsored Program
STTRAwarding Agency
DOD : OSDTotal Award Amount
$849,850Award Phase
2Solicitation Topic Code
OSD10-T006Principal Investigator
Henry I SmithCompany Information
Phase I
Contract Number: ----------Start Date: ---- Completed: ----
Phase I year
2011Phase I Amount
$99,916Phase II
Contract Number: ----------Start Date: ---- Completed: ----
Phase II year
2012Phase II Amount
$749,934Keywords:
Maskless Lithography, Maskless Photolithography, Computer-Generated Holograms, Sub-100 Nm Resolution