SBIR-STTR Award

This Small Business Innovation Research (SBIR) Phase I project will develop a vibratory gyroscope with electrostatic actuation and capacitive (or piezoelectric) detection at 0.1 - 1 MHz, a much higher frequency than the ones used by current commercial MEMS gyroscopes and with quality factors exceeding 1000. Because of the high frequencies, the thermal Johnson noise (which typically defines the noise floor for standard micromechanical gyroscopes) is reduced considerably by orders of magnitude. The proposed technology involves a two-mode approach in which the drive force is applied in one mode of the resonator. Under external rotation, this mode is coupled to a second mode, which is detected, either by electrostatic or piezoelectric technique. Using this approach, it is possible to achieve micron-sized chip-scale gyroscopes, manufactured on wafer scale, with performance parameters compared to high-end tactical grade gyroscopes. Micromechanical vibratory gyroscopes have increasing relevance in inertial navigation systems and automotive applications. Beyond these applications which require devices with better sensitivity and performance parameters, a host of new applications in consumer electronics have suddenly emerged. In particular, hand-held devices such as cellular devices and GPS systems, and gaming consoles such as the Nintendo Wii are now including miniature gyroscopes as low cost companion to existing micromachined accelerometers. These applications are in essence similar to the automotive applications in which the gyroscopes are used to detect angular rotation and provide ride stabilization, roll over detection and better traction control. Development of high sensitivity high stability micromechanical gyroscopes will also be of importance to a number of fundamental research questions, which include measuring gravitational red shift for validating the predictions of general relativity. As an inertial system, a highly sensitive gyroscope that can be cooled down to low temperatures can also be used to detect or put limits on new fundamental spin-dependent forces. "This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5)

This Small Business Innovation Research (SBIR) Phase II project seeks to develop the next-generation chip-scale Micro-Electro-Mechanical Systems (MEMS) gyroscopes for use in wireless devices that now require unprecedented device performance with minimum possible footprint. For instance, inertial navigation and motion sensing in most cellular devices require gyroscopes with small size, high sensitivity and stability, low drift and low power consumption. Most MEMS gyroscopes used in consumer electronics and wireless devices do not yet meet all the criteria for large-scale deployment in the fastest growing segment of the market: handheld devices. Existing MEMS gyroscopes are fundamentally limited by their underlying technology - electrostatic actuation and detection of vibration and rotational amplitudes. For this research project, a new approach has been proposed to the engineering of MEMS gyroscopes that can detect 3-axis rotation with unprecedented sensitivity and stability with minimal footprint. The goals of the Phase II project are to (i) develop both 2-axis (x-y) and hybrid 3-axis (x-y, z) micromechanical gyroscopes; (ii) develop associated driving and sensing integrated circuits (IC); (iii) test and characterize the devices for optimal performance parameters; (iv) bond the IC wafer to the MEMS wafer with wafer-level packaging. The broader impact/commercial potential of this project can lead to a revolution in the consumer wireless systems market with the standing promise of an integrated single-chip inertial sensor and timing device. Micromechanical gyroscopes have increasing relevance in inertial navigation systems and automotive applications. Beyond these applications which require devices with better sensitivity and stability, a host of new applications in consumer electronics have suddenly emerged. In particular, handheld devices such as cellular devices and GPS systems, and gaming consoles such as the Nintendo Wii now include miniature gyroscopes that must have extremely small footprint and consume very little power. The proposed approach lends itself to natural chip-scale integration with timing devices for future production of Timing and Inertial Motion-Sensing Units (TIMU), necessary for next generation inertial navigation. Another commercial impact will be on the chip manufacturing industry, as the integrated circuits (IC) wafers will be fabricated in the United States, in potentially high volumes. Sand 9 is involved in the proactive employment of women and minorities in its engineering team, towards its commitment to the creation of a diverse, next-generation workforce in the MEMS industry