SBIR-STTR Award

EMI proposes to develop a novel digital self-calibration and compensation algorithm and a novel fabrication process for the fused silica birdbath resonator gyroscope (BRG). The mechanical resonator of the BRG is made of fused silica and has a shape of an inverted wineglass or a birdbath. The resonator has a mechanical quality factor (Q) on the order of 1-5 million. At the University of Michigan, a prototype BRG demonstrated a short-term in-run bias stability (0.0014 deg/hr) and angle random walk (ARW = 0.00016 deg/sqrt(hr)) at room temperature without temperature control. Digital algorithms for bias and scale factor due to long term Q change, drive and sense electrode misalignment, capacitive feedthrough, and electrode-to-shell misalignment will be developed. A low-cost dual-layer vacuum packaging process will be developed to obtain excellent vacuum pressure level and excellent vacuum leakage rate.

Benefit:
The proposed research efforts will pave a way to commercialize the first near-navigational-grade MEMS IMU with excellent Size, Weight, and Power (SWaP). The BRG has demonstrated highly promising short term bias stability (0.0014 deg/h). However, in order to be used in a wide range of DoD applications, it is crucial for the BRG to obtain excellent bias and scale factor stability in long term (weeks to months) in environments with large temperature change and with vibrations and shocks. We believe that the novel self-calibration and compensation algorithms and dual-layer packaging technology will allow the BRG to obtain excellent long-term bias and scale factor stability. The IMU made with BRG will be used in many existing and emerging autonomous systems in DoD. The BRG will be able to be used in a wide range of civilian applications (e.g. autonomous vehicles, drones, wearable electronics).

Keywords:
Inertial Measurement Unit (IMU), Inertial Measurement Unit (IMU), readout-and-control electronics, dual-layer vacuum package, quality factor (Q), self-calibration and compensation, near-navigational-grade, Birdbath Resonator Gyroscope (BRG)

Our goal for this Navy SBIR project is to develop a TRL-7 prototype of the BRG with excellent long-term bias stability and shock and vibration insensitivity that can operate in a military temperature range (-5080 C) and optionally can operate at very high temperature (200 C) (i.e. bias drift 4 million)

Benefit:
We will develop a new miniature high-precision gyroscope that has similar accuracy (i.e. bias stability and angle random walk) with conventional fiber-optic gyroscopes or ring-laser gyroscopes such as Northrop Grummans LN-200 (= Fiber Optic Gyroscope) and Honeywells HG 1700 (= Ring Laser Gyroscope). The BRG will have approximately 100 times lower cost and volume than fiber optic gyroscopes and ring laser gyroscopes. The BRG will be used in a wide variety of existing and emerging defense, aerospace, and commercial applications.

Keywords:
Packaging, interface electronics, bias stability, fused silica, Angle Random Walk, Gyroscope, high Q, birdbath resonator gyroscope