The objective of the proposal is to demonstrate the feasibility of a generic package that provides high vacuum, temperature control and vibration isolation for a wide range of high performance (tactical and navigation grade) micromachined inertial sensors. Inertial sensors (accelerometers and gyroscopes) are now widely used in consumer and industrial applications. However, for high performance navigation and targeting applications there are several packaging challenges which act as roadblocks to their commercialization including: i) their need for low vacuum pressures (
Benefit: High performance (tactical and navigation grade) inertial sensors are a key technology for next generation navigation and targeting systems and will replacing much larger (> 100 times larger) ring laser gyroscopes (RLG), fiber optic gyroscopes (FOG) and hemispherical resonant gyroscopes (HRG). This could enable a wide range of man portable targeting and navigation systems and unmanned aerial vehicles (UAVs). This could also enable many satellite pointing, telescope pointing and the navigation and control of ultraminiaturized satellites.
Keywords: temperature stability, temperature stability, Gyroscope, Packaging, Vibration, MEMS, Accelerometer, Vacuum, oven control
