SBIR-STTR Award

This SBIR Phase I project will develop a MEMS gyroscope that uses an ultra high resolution sensing technique for measuring proof mass motion. The goal is to demonstrate the feasibility of this concept by understanding the optical, mechanical, and electrical performance characteristics that result from using micro interferometric sensing in a MEMS gyroscope. Specific objectives of the Phase I effort are to (1) develop a system level model that captures the behaviors of interest and enables design decisions (2) demonstrate sufficient optical performance for high resolution sensing in a prototype scale package and (3) show that this sensing technique improves device stability by enabling a design with a large separation between the sense resonance frequency and drive resonance frequency. This large separation in frequencies results in a device with much greater stability and better performance over temperature enabling the use of this technology in metric tracking hardware and tactical navigation applications. The TRL at the beginning of the contract is between zero and one. At the end of the contract the TRL will be 3.

The proposed innovation is a novel MEMS gyroscope that uses micro-interferometric detection to measure the motion of the proof mass. Using an interferometric detection technique enables the measurement of proof mass motion with resolution equal to or better than systems that have CMOS detection electronics fabricated on the MEMS substrate. Furthermore, this detection technique can be applied to MEMS designs fabricated in a variety of processes, freeing up more design space and enabling a MEMS design not limited by MEMS fabrication constraints. This combination of factors allows for a broader design space and thus the sense resonant frequency will not have to be closely matched to the drive resonant frequency. This separation of frequencies results in a device that is inherently more stable and easier to manufacture. Specific objective of phase II are: (1) Produce a low cost, low power MEMS gyroscope using interferometric sensing that meets the needs for NASA applications. (2) Deliver multiple prototypes to NASA and other potential customers for evaluation. (3) Demonstrate that the gyroscope prototypes have acceptable performance. The challenges to successfully developing this technology are substantial. Advanced MEMS fabrication technology, innovative micro-optical designs coupled with novel MEMS packaging, and design and simulation techniques will enable successful development of this technology.