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SBIR-STTR Award
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SBIR-STTR Award
10
High-Speed Scanning Interferometer Using CMOS Image Sensor and FPGA Based on Multi-Frequency Phase-Tracking Detection
Award last edited on: 12/19/2008
Sponsored Program
SBIR
Awarding Agency
NASA : GSFC
Total Award Amount
$100,000
Award Phase
1
Solicitation Topic Code
-----
Principal Investigator
Tetsuo Ohara
Company Information
NanoWave Inc
PO Box 490
Sutton, MA 01590
(857) 413-4901
info@nanowave.com
www.nanowave.com
Location:
Single
Congr. District:
02
County:
Worcester
Phase I
Contract Number:
----------
Start Date:
----
Completed:
----
Phase I year
2009
Phase I Amount
$100,000
In this SBIR, we propose a new type of laser interferometer engine for in-situ large optics inspection and metrology and supporting system platform. The proposed FPGA signal processing concept together with new generation high-speed CMOS image sensor enables high speed (> 1m/sec) and real-time continuous surface profiling with minimum local memory. This transforms the currently available laser interferometer into a sub-nanometer precision instrument with only minor modification while providing easy scalability for large optic surface testing and measurement capability simultaneously.
Phase II
Contract Number:
----------
Start Date:
----
Completed:
----
Phase II year
----
Phase II Amount
----
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