Teravicta Technologies proposes innovative solutions to greatly improve RF MEMS manufacturing technology, thereby enabling cost-effective production of high performance, high reliability, and low cost X-band phase shifters for next generation large MDA fire control radars. The objective of this Phase I proposal is to perform trade studies, supported by RF modeling and experimental measurements, that validate and prioritize new design and manufacturing process extensions for the scaling of today's commercial-grade RF MEMS switch technology, to meet MDA X-band radar system performance, reliability, and cost requirements. The outcome of the effort will be both a manufacturing technology roadmap and an RF-simulated design of a robust, low-cost packaged three-bit X-band phase shifter employing ultra-low loss ohmic contact RF MEMS switches. Teravicta will work with its manufacturing partners to validate cost projections