
Novel Wet Developable Materials for DUV LithographyAward last edited on: 1/26/2007
Sponsored Program
SBIRAwarding Agency
DOD : MDATotal Award Amount
$65,000Award Phase
1Solicitation Topic Code
BMDO02-014Principal Investigator
Jody NeefCompany Information
Brewer Science Inc (AKA: Terla Inc)
2401 Brewer Drive Po Box Gg
Rolla, MO 65401
Rolla, MO 65401
(573) 364-0300 |
tflaim@brewerscience.com |
www.brewerscience.com |
Location: Multiple
Congr. District: 08
County: Phelps
Congr. District: 08
County: Phelps
Phase I
Contract Number: ----------Start Date: ---- Completed: ----
Phase I year
2002Phase I Amount
$65,000Keywords:
BARC, Wet Developable, DUV, antireflective coating
Phase II
Contract Number: ----------Start Date: ---- Completed: ----