Skip to main content
idi
Toggle navigation
0
You have 0 notifications
Site Visitor
Site Visitor
New To Inknowvation.com?
Register now to get an access to proprietary SBIR-STTR databases!
Registration is fast and free - start your access to business-actionable information today!
Login
Site Register
SBIR-STTR Award
You are here:
Home
Search Databases
Search SBIR-STTR Awards
SBIR-STTR Award
10
Room Temperature Wet Chemical Growth of Low Dielectric Constant SiO-Based Thin Films for ULSI Microelectronics
Award last edited on: 4/8/08
Sponsored Program
SBIR
Awarding Agency
DOD : MDA
Total Award Amount
$762,895
Award Phase
2
Solicitation Topic Code
BMDO99-014
Principal Investigator
Maria Faur
Company Information
Special Materials Research & Technology
27390 Lusandra Circle
North Olmsted, OH 44070
(440) 777-4292
N/A
N/A
Location:
Single
Congr. District:
16
County:
Phase I
Contract Number:
NAS3-99-172
Start Date:
5/25/99
Completed:
11/24/99
Phase I year
1999
Phase I Amount
$62,895
SPECMAT, Inc. proposes todemonstrate the use of its revolutionary Room Temperature Wet Chemical Growth (RTWCG) process to grow low dielectric constant (2
Potential Commercial Applications:
Due to the high interest in developing stable low k inorganic dielectric films (e.g. for surface passivating, ultrathin gate dielectrics, IMDs and ILDs) rapid implementation of this new technology is extremely likely. Based on preliminary results, the low-cost new process has the potential to become the process of choice for many future ICs, from radiation hard ULSI for space and military applications to next generation commercial ICs.
Phase II
Contract Number:
NAS3-01080
Start Date:
10/23/00
Completed:
10/23/01
Phase II year
1999
Phase II Amount
$700,000
The goal of this SBIR program is to further develop the new Room Temperature Wet Chemical Growth 9RTWCG) process to grwo low dielectric constant (1.5
×
Login to your account
Mail sent successfully.
Enter any username and password.
Username
Password
Remember me
Login
Forgot your username?
Click here for assistance
Forgot your password?
Request new password
Don't have an account?
Sign up
Forgot username?
Mail sent successfully.
Enter username and password.
Please enter email address that is associated with your account.
Back
Submit
Still Need Help?
If you need further assistance, send us an
e-mail
and we will assist you in resetting your account.
Forgot password?
Mail sent successfully.
Enter username and password.
Please enter email address that is associated with your account.
Back
Submit
Still Need Help?
If you need further assistance, send us an
e-mail
and we will assist you in resetting your account.