Agiltron will develop a new class of chemical vapor analyzer by leveraging Agiltrons development and production of micro-electrical-mechanical systems (MEMS) products and expertise with surface-enhanced Raman scattering (SERS) analysis and film fabrication. Our approach capitalizes on integration of these separate technologies to generate a unique and novel functionality that fully addresses all requirements of this program. The proposed chip-based device contains a micro-sized vapor sampling apparatus coupled with an optical chemical readout. The technical approach will be proven in Phase I through numerical analysis, design, and experiments. Prototype sensors will be produced in Phase II for delivery to the DTRA.