
Resonant Heterodyne Interferometer for Plasma Process ControlAward last edited on: 8/31/2006
Sponsored Program
SBIRAwarding Agency
DOETotal Award Amount
$99,996Award Phase
1Solicitation Topic Code
-----Principal Investigator
Robert C HazeltonCompany Information
Phase I
Contract Number: ----------Start Date: ---- Completed: ----
Phase I year
2006Phase I Amount
$99,996Commercial Applications and Other Benefits as described by the awardee:
A plasma-depostion control system using the resonant heterdyne interferometer should lead directly to significant improvements in the manufacturing of drive train components used in heavy equipment. Since the sensor can be applied to almost any plasma species, it also would have broad application in the diagnosis, monitoring, and control of any industrial plasma processor. It has been estimated that the successful control of the deposition of hard coatings could lead to annual savings of $6 billion in the auto industry alone
Phase II
Contract Number: ----------Start Date: ---- Completed: ----