In this Small Business Innovation Research Phase I project, Amsen Technologies is teamed with the Center for Advanced Materials (CAM) of University of Houston to develop a process to fabricate BST thin film capacitors with reduced series resistance through an innovative interface optimization strategy. The overall objective of the present innovation is to grow epitaxial or highly oriented BST thin film on epitaxial Pt electrodes. Experimentally, three steps need to go in sequence to make the BST-on-Pt structure, both E-beam evaporation and pulsed laser deposition (PLD) will be used in the process. The Phase I effort will be aimed at establishing the proof-of-concept that the new process to fabricate BST thin film capacitors with reduced series resistance can be developed. In Phase II, we will be devoted to the optimization of the technology.
Keywords: Semiconductors, Semiconductor Processing, Microelectronics, Barium Strontium Titanate, Bst, Communication, Frequency Agile Materials, Tunable Materials
