HT Micro proposes to establish a metal MEMS manufacturing process as an effective high rate component manufacturing technology. This will bring miniaturization and cost savings comparable to that provided by conventional silicon MEMS manufacturing to a very large number of important new applications. Metal MEMS micro-fabrication is established at the research and prototype level, but has not been matured for deployment into high rate product manufacturing. The fabrication technology is currently TRL 5, being performed strictly in a research laboratory environment, and is now ready to begin the transition from the research fab into the factory. Once this transition is complete, there are numerous high-value military and commercial components that will benefit. For specificity, HT Micro will use an impact switch, developed under contract to the US Army, as the component vehicle to move metal MEMS processes from prototype fabrication to product manufacturing.
Keywords: Metal Mems, High Rate Production, Microfabrication, High Aspect Ratio Microfabrication,
