SBIR-STTR Award

This proposed SBIR Phase I effort initiates the development of ovenized inertial MEMS sensors (OI-MEMS) to achieve the tactical performance requirements of MEMS inertial measurement units (IMUs), in particular bias and scale factor stability for military, aerospace and high-end industrial and commercial markets. The primary outcome of the proposed effort is a 6-axis OI-MEMS IMU fabricated with a bias and scale factor stability of 1deg/hr and 10ppm for the gyroscope, and 1mg and 1ppm for the accelerometer across -40 to +85 deg C temperature range.

This proposed SBIR Phase II project continues the development of ovenized inertial MEMS sensors (OI-MEMS) technology and development of a tactical-grade MEMS inertial measurement units (IMU) with significant, size, weight and power (SWaP) advantage over presently available off-the-shelf IMUs. The specifications of this IMU address the need in military, aerospace and high-end industrial and commercial markets. The proposed 6-axis OI-MEMS IMU has a bias and scale factor stability better than 1deg/hr and 10ppm for the gyroscope, and better than 1mg and 1ppm for the accelerometer across -40 to +85 deg C temperature range.