SBIR-STTR Award

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Compact Integrated Silicon Nitride Microresonator Accelerometer
Award last edited on: 1/8/2015

Sponsored Program
STTR
Awarding Agency
DOD : DARPA
Total Award Amount
$1,099,967
Award Phase
2
Solicitation Topic Code
ST13A-002
Principal Investigator
Dennis Tishinin

Company Information

Applied Optronics Corporation

2008 Eastpark Boulevard
Cranbury, NJ 08512

Research Institution

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Phase I

Contract Number: ----------
Start Date: ----    Completed: ----
Phase I year
2013
Phase I Amount
$99,990
To solve the DARPA need for high-performance MEMS-based optomechanical accelerometers, Applied Optronics proposes to develop a Compact Integrated Silicon Nitride Microresonator Accelerometer (OPTIMA), which is based on a combination of a high-Q silicon ni...

Keywords:
High-Bandwidth, High-Sensitivity, Optomechanical, Mems, Accelerometer, Silicon Nitride

Phase II

Contract Number: ----------
Start Date: ----    Completed: ----
Phase II year
2014
Phase II Amount
$999,977
The overall goal of this Phase II project is to demonstrate the feasibility of the proposed OPTIMA technology through modeling, design optimization, and experimental demonstration of the accelerometer prototype. During the Phase II, we plan to continue th...

Keywords:
High-Bandwidth, High-Sensitivity, Optomechanical, Mems, Accelerometer, Inertial Measurement Unit, Ring Resonator