
Integrating Molecular Transfer Lithography with Electron Beam Lithography for Low-Volume Sub-32 nm CMOS ProcessingAward last edited on: 7/8/2010
Sponsored Program
SBIRAwarding Agency
DOD : DARPATotal Award Amount
$99,000Award Phase
1Solicitation Topic Code
SB082-043Principal Investigator
Charles SchaperCompany Information
Transfer Devices Inc (AKA: TDI~)
45778 Northport Loop West
Fremont, CA 94538
Fremont, CA 94538
(510) 445-1060 |
mxl@transferdevices.com |
www.transferdevices.com |
Location: Single
Congr. District: 17
County: Alameda
Congr. District: 17
County: Alameda
Phase I
Contract Number: ----------Start Date: ---- Completed: ----
Phase I year
2009Phase I Amount
$99,000Keywords:
Molecular Transfer Lithography, Electron Beam Lithography, Nanopatterning, Semiconductor Manufacturing
Phase II
Contract Number: ----------Start Date: ---- Completed: ----