SBIR-STTR Award

Vism Corporation proposes to demonstrate a tunable Fabry-Perot filter (TFPF) using a highly innovative MEMS process called Surface Micromachined Bulk Silicon (SUMBS), for applications in RPG or missile threat warning or multispectral imaging systems. The MEMS TFPF employs a novel digital electrostatic actuator made of single crystal silicon that provides high accuracy tuning with ultra compactness, low-weight, and high speed. Further, the SUMBS process technology provides a unique 3-D, vertically integrated architecture that gives rise to small size, low cost, high accuracy, high yield and superior manufacturability

We propose to demonstrate tunable Fabry-Perot filter (TFPF) for hyperspectral imaging sub-systems that can be integrated in surveillance, target recognition and threat warning systems. The MEMS TFPF employs a novel electrostatic actuator made that provides high accuracy tuning with compactness, low-weight, digital tuning, and high speed.

Keywords:
Fabry Perot Interferometer, Hyperspectral, Mems, Actuator