SBIR-STTR Award

The Manufacturing Knowledge System (MKS) is a prototype framework for Computer Integrated Manufacturing (CIM) of semiconductors which is under development at the stanford center for integrated systems. This system is a significant step forward in addressing the issues of openness, availability and maintainability which have limited the application of CIM to the strategically important semiconductor industry. While this research program is still underway, product development of specific components of the system may now be undertaken and will accelerate the effective availability of this software to the semiconductor industry. This proposal addresses the necessary elements of transforming the results of a basic research program into a viable product. Specifically, Phase I addresses the market research and product development planning that are essential parts of any new product introduction. Then, Phase II is expected toAddress the conversion and demonstration of prototypical software into a robust product suitable for beta testing at a planned commercial site and at sematech resulting in the early application of mks in industry. Anticipated benefits/potential commercial applications - this coupling of the SBIR program with on-going basic research provides crmcal funding for technology transfer that otherwise would not be available. In addition, the proposed Phase II demonstration at sematech will accelerate their CIM schedule by at least 12 months and extend their goals beyond the work cell controllers to the shop floor control level. The early availability of a CIM framework will benefit all CIM vendors by providing a much needed standard for system integration.

We propose to develop a modular family of CIM software for "agile" semiconductor manufacturing. The software consists of modules known as Unified Factory Modules (UFMs) that communicate through a distributed information service (DIS). Each UFM is a building block that models one element of a flexible factory, such as a piece of equipment, a workcell, or event the entire fab line. It encapsulates all of the application software, parameters and state associated with its component, providing a consistent view of that component from both a virtual and physical factory perspective. The approach will also encourage manufacturing personnel to build and maintain their own factory models, allowing "plug-and-play" equipment or workcell to be modularly installed in a factory. UFMs will be implemented on DIS, an OMG-compatible service for messaging and information sharing originally developed by EIT for Stanford. UFMs register their interests and capabilities with DIS, which is then responsible for routing a module's messages to others with the appropriate expertise or need to know. Systems structured in this way are inherently open, scalable, and reliable. The DIS framework is fully compatible with open protocols emerging from standardization efforts by CFI, Sematech and others. Anticipated

Benefits:
UFM enables industry to meet DOD's need for agile (high mix, low volume) production, with modularized equipment that can be readily plugged into the CIM environment - a first step toward ARPA's CSPED vision. UFM's view of an integrated physical/virtual factory will open up new opportunities for TCAD vendors to apply their simulation technology on the factory floor. UFM will be developed in collaboration with a government-operated R&D fab line, and will provide a continuing pipeline for transferring ARPA-sponsored research results to the semiconductor industry.