SBIR-STTR Award

Technology Computer Aided Design (TCAD) tools are now critical in the design and manufacture of integrated circuits. As industrial interest has grown, the number of sources of these tools has increased. Each tool typically uses a unique data representation, making integration of several tools difficult. In addition, a natural interaction between TCAD and Electronic Design Automation (EDA) tools has been recognized, and data sharing is needed. This project proposes to investigate and recommend the best way to address the need to TCAD integration through a unifying framework. There is an ongoing industry-wide effort in this area, the TCAD framework initiative, and TMA is an active participate in this enterprise. In addition, the use of frameworks has been demonstrated for integrating multisource EDA tools. These systems and others will be evaluated for their applicability to TCAD. Phase I of this project will have two distinct stages: 1)the feasibility and practicality of a framework for TCAD tool integration will be investigated; and 2) a functional design and implementation plan will be developed and delivered. The results of this Phase I effort will provide a plan for the development of an integrated TCAD system during Phase II. Anticipated benefits/potential commercial applications of the research or development. The realization of the integrated TCAD system proposed under this project will benefit TCAD tool users and developers alike. It will benefit users by mailing individual tools easier to use and provide a means to effectively use a set of TCAD tools as part of a technology design methodology.

Semiconductor technology design programs today are characterized by exorbitant costs, protracted design cycles, and manufacturability problems. The use of technology computer-aided-design tools (TCAD) is essential to solving these problems. However, the tools available today do not interoperate well, are difficult to use, and do not support distributed computing. These problems are a significant barrier to the effective use of existing TCAD tools. TMA is working with the CAD Framework Initiative Semiconductor Process Representation (SPR) Working Group to develop an industry-wide SPR standard to address these problems. TMA proposes to develop an alpha version of an SPR server, based on the industry standard, that will consist of a process repository with process editing and simulation management services. Object-oriented software engineering principles will be applied in the analysis, design, and implementation of the server. The server will be implemented in C++. At ARPA's option, TMA further proposes to work with major U.S. semiconductor manufacturers to extensively alpha and beta test the SPR server, complete a commercially releasable version, and insert this technology into key U.S. semi-conductor organizations. The result of this development effort will be a commercially available SPR server. Anticipated

Benefits:
The SPR server will reduce the barriers to effective use of TCAD tools in the key areas of interoperability, ease of use, and distributed computing. This will reduce the cost, time, and complexity of semiconductor technology design programs. Since the server will be based on an industry standard semiconductor process representation and will meet demonstrated industry needs, the potential for wide-spread industry adoption and use is great.