NOVELX, Inc. proposes to develop and market a compact scanning electron microscope (SEM) with X-ray analysis capabilities for mobile, homeland defense, commercial, and military applications. The Phase I technical objective is to investigate the feasibility of integrating a miniature modular scanning electron microscope (mmSEM) with a thermoelectrically cooled silicon X-ray detector, in order to produce a truly low-cost, low-power, portable, liquid nitrogen-free analysis system. The mmSEM will nominally operate in two modes: high resolution imaging mode at 1keV with <25nm image resolution, and high voltage X-ray analysis mode, with <175eV energy resolution at 5.9 keV (Mn-K?). Several novel technologies and innovations will be incorporated into the NOVELX analytic mmSEM. The column will consist of all electrostatic, micromachined, batch-fabricated silicon components using micro-electromechanical systems (MEMS) technologies. Batch processing will drive the component costs down while MEMS micromachining and silicon technologies guarantee that the dimensions of the components will be delivered precisely as designed. The silicon components will be packaged using advanced integrated ceramic technologies. The miniature column will be mated with one of several commercially available "off-the-shelf" thermoelectrically cooled silicon X-ray detectors and electronics, and assembled in a compact, load-locked vacuum chamber. The analytic mmSEM will be packaged in a tabletop or portable format and enable high-resolution imaging and on-demand energy dispersive X-ray (EDX) analysis of structures and devices, insulating and conductive, as well as biological materials
