A need for miniaturized mass spectrometer (MS) instrumentation exists for both stationary point monitoring and applications where instrument size is critical, including military swatch test monitoring of chemical agent permeation rates and field detection of chemical agents. A 50% size and weight reduction over current portable MS instrumentation through modern microfabrication techniques while maintaining excellent performance represents a major breakthrough in detection capability. Planar, microfabricated ion trap (IT) MS devices will be constructed that meet these requirements of high sensitivity, high resolution, tandem MS operation, high operating pressure, reduced cleaning and service requirements, unsurpassed robustness, and ease of use. A novel two-plate microfabrication approach is proposed which will allow higher electric field accuracy than is possible using other microfabricated techniques, resulting in high mass resolution and sensitivity. The dual analyzer will simultaneously characterize both positive and negative ions (including MS/MS mode), allowing detection of a broad range of chemical targets. This approach allows the benefits of microfabricationâhigher operating pressure, lower power, lower costâwhile overcoming the performance deficiencies of other MS techniques. Widespread interest in the first high performance microfabricated linear ITMS system is anticipated with commercial applications for detection of explosives, drugs, toxic industrial chemicals, and environmental pollutants.
Keywords: Microfabrication, Linear Ion Trap, Mass Spectrometer, Chemical, Detection
