SBIR-STTR Award

We propose a solid-state angular based microelectromechanical systems (MEMS) technology. The rate sensor utilizes a tuning fork resonator design with control and readout electronics integrated on the dame chip as the sensor. The sensor will be designed to operate at high spin rates (300 rev/sec) with high accuracy for smart munitions, as well as potential commercial applications. The sensor is inherently small, lightweight, and consumes little power. Since it can be batch fabricated using integrated circuit processing techniques, it can be manufactured in large volumes at low cost. We propose to develop the sensor in collaboration with Analog Devices Incorporated, using their established state-of-the-art integrated MEMS fabrication process which combines BiCMOS electronics with polysilicon surface micromachined mechanical elements. Designing the sensor using an existing manufacturing processs will reduce the technical risk, cost, and time of the development, and naturally leads to commercial manufacturing in high volumes subsequent to the development.

Keywords:
Rate Sensor Gyro Microsensor Spin Control Tuning Fork Surface Micromachined Smart Munitions

We propose the development of an angular rate sensor for smart munitions based on microelectromechanical systems (MEMS) technology. The sensor is designed for the state-of-the-art integrated polysilicon surface micromachining process at Analog Devices, Inc. (ADI). The design is based on a tuning fork resonator concept, with on-chip interface electronics to create a self-contained sensor with both an analog voltage and a digital output. The sensor is designed to operate at high spin rates (300 Hz) and meets the performance specifications provided for the smart munitions application. It is inherently small, lightweight, and consumes a few milliWatts of power. Since it can be batch fabricated using integrated circuit processing techniques, the sensor can be manufactured in large volumes at low cost (e.g., ~$5). Transducer element design, interface circuit design, sensor fabrication, laboratory testing, field testing, and package development will be performed for three prototype generations, leading to a complete and working sensor at the completion of Phase II. By leveraging the established manufacturing process technology of ADI, the technical risk, cost, and time of development is reduced tremendously, and commercial manufacturing in high volumes in Phase III will be a natural and seamless transition.

Keywords:
Rate Sensor Micromachined Gyro Integrated Circuits Smart Munitions Mems Spin Sensor