In 2001, Sensys Instruments Corporation was acquired by Therma-Wave, another SBIR involved firm. Sensys develops and markets products that provide advanced process control solutions to the semiconductor manufacturing industry with emphasis on improving the productivity of process equipment in semiconductor fabs. This is accomplished by configuring critical metrology tools for stand alone or for on-board Process Tool applications to achieve wafer-to-wafer control, an essential element of Advanced Process Control (APC). Sensys currently offers the CMS 2000, a Compact Metrology System -an advanced, high speed optical metrology system which can be adapted for multiple applications including CMP, CVD, Etch and Lithography. It comes with a variety of options for stand alone or on-board OEM configurations.
