In this phase I project, we propose to fabricate high performance, low noise, MEMS optical switch, based on ultrananocrystalline diamond (UNCD) technology. This innovative thin film technology has demonstrated ultra smooth, phase pure diamond thin film fabrication, leading the path to fabrication of high performance micro-miniature optical switches. Working jointly with Argonne National Laboratory in phase I, we will demonstrate the core technology by fabricating small prototypes of UNCD based MEMS optical switches and evaluating their optical, mechanical and switching characteristics. In phase II, we will focus on integration of many MEMS switches and its packaging aspects to develop a new class of high performance, mechanically robust MEMS optical switch. Anticipated Benefits/Commercial Applications: Potential applications of the proposed technology include optical switches for telecommunication, RF switches, biomedical sensors, field emission devices, hard coatings and novel vacuum microelectronic devices.
Keywords: diamond, switches , mems
