
Micromachines for Microchips: Bringing the AFM up to SpeedAward last edited on: 11/4/13
Sponsored Program
SBIRAwarding Agency
DOD : DARPATotal Award Amount
$800,200Award Phase
2Solicitation Topic Code
SB992-039Principal Investigator
Stephen C MinneCompany Information
Nanodevices Inc
5571 Ekwill Street
Santa Barbara, CA 93111
Santa Barbara, CA 93111
(805) 884-0240 |
N/A |
N/A |
Location: Single
Congr. District: 24
County: Santa Barbara
Congr. District: 24
County: Santa Barbara
Phase I
Contract Number: DAAH0100CR014Start Date: 10/26/99 Completed: 6/30/00
Phase I year
1999Phase I Amount
$99,000Keywords:
Atomic Force Microscopy; Piezoelectric Actuator; Mems Actuator
Phase II
Contract Number: DAAH0100CR218Start Date: 9/18/00 Completed: 12/27/02
Phase II year
2000Phase II Amount
$701,200Keywords:
Atomic Force Microscopy; Piezoelectric Actuator; MEMS Actuator; Active Damping; High Speed Imaging