Single and multicomponent oxides of high purity and particle sizes in the manometer size range are being prepared using a vapor phase reaction process. The reaction and particle formation mechanisms are simulated to relate particle size and surface composition to mixing geometries, gas phase compositions, and temperatures. Limited experimental work is being performed to prepare several grams of a metal oxide material for particle size analysis and surface chemistry investigations.The potential commercial application as described by the awardee: High purity single and multicomponent oxides in the nanometer size range have potential applications in catalysis and other advanced materials such as ceramics.