SBIR-STTR Award

Development of an innovative high powered vacuum ultra violet light source
Award last edited on: 3/27/03

Sponsored Program
SBIR
Awarding Agency
NSF
Total Award Amount
$75,000
Award Phase
1
Solicitation Topic Code
-----

Principal Investigator
Philip C Efthimion

Company Information

Envimetrics (AKA: EEI)

1 Kestrel Lane
Bedminster, NJ 07921
   (908) 256-5033
   N/A
   www.envimetrics.com
Location: Single
Congr. District: 07
County: Somerset

Phase I

Contract Number: 9361318
Start Date: 00/00/00    Completed: 00/00/00
Phase I year
1993
Phase I Amount
$75,000
A high power density (greater than 1,000 W/cc) microwavedriven plasma source has been developed, and it can potentially be an efficient vacuum ultra violet (VUV) light source. This assessment is based upon previous spectroscopic measurements and power balance analysis of steam plasmas created at atmospheric pressure with only 6 kW of power. A new UV light source with high power below 200nm which can be potentially applied to photolithography and surface treatment of polymers is being developed in this research.Commercial Applications:This new class of light source can be potentially applied to photolithography, and surface treatment of polymers.

Phase II

Contract Number: ----------
Start Date: 00/00/00    Completed: 00/00/00
Phase II year
----
Phase II Amount
----