Epion Corporation (AKA: TEL Epion) Profile last edited on: 12/28/22
CAGE: 0GHF7
UEI: LQ14K3CMMJG3
Business Identifier: Gas cluster atomic scale surface smoothing and cleaning 
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Location Information
Location: Single
Congr. District: 06
County: Middlesex
Congr. District: 06
County: Middlesex
Public Profile
In 2000, Epion was acquired by JDS Uniphase - one of many SBIR acquisitions by that firm in the period but subsequently came back into SBIR involvement. Epion manufactures and supplies commercial gas cluster ion beam (GCIB) equipment for semiconductor and related manufacturing. Its products include nFusion Doping System, which offers ultra-shallow doping of atoms to high concentrations without channeling; and Ultra Trimmer Corrective Etch System that is used to trim surface layers to improve device performance or yields. The firm also markets GCIB systems to companies for the enhancement of critical surfaces in devices used for data storage, optics, and telecommunications in the US and Japan. Epion Inc. was formerly known as Epion Corporation but changed its name to TEL Epion Inc. in January 2007 after the firm was acquired by Tokyo Electron .
Extent of SBIR involvement
Synopsis: Awardee Business Condition
Employee Range
50-74Revenue Range
5M-7.5MVC funded?
YesPublic/Private
Privately HeldStock Info
----IP Holdings
50-74Awards Distribution by Agency
Most Recent SBIR Projects
| Year | Phase | Agency | Total Amount | |
|---|---|---|---|---|
| 2005 | 2 | DOE | $700,000 | |
| Project Title: Improving the Performance of High Gradient RF Structures by Surface Treatment with Gas Cluster Ion Beams | ||||
| 2000 | 2 | AF | $876,052 | |
| Project Title: Gate Oxide Screening Methodology and Surface Smoothing for Advanced SOI Space System Applications | ||||
| 2000 | 2 | NSF | $498,416 | |
| Project Title: Gas-Cluster Ion Source for Mass Spectrometer and Microelectronic Applications | ||||
| 1999 | 2 | AF | $847,119 | |
| Project Title: Improved Buffers and Processing for Oriented YBCO on Biaxial Metal Tape | ||||
| 1999 | 1 | DOE | $100,000 | |
| Project Title: Supersmooth Neutron Optical Surfaces by Gas Cluster ION Beam Processing | ||||
Key People / Management
Allen R Kirkpatrick -- Chairman & CEO
William McLendon -- President
L P Allen
Nils Bonde-Henriksen
Bruce Garcia -- CFO
David R Swenson
William McLendon -- President
L P Allen
Nils Bonde-Henriksen
Bruce Garcia -- CFO
David R Swenson
Company News
There are no news available.
